Nickel MEMS Energy Harvesters for the Self-Powering of Vehicular Sensing Systems

MEMS-Based Piezoelectric Energy Harvesters: Major Design Considerations for Powering Remote Microsystems

Studying piezoelastic and piezomagnetoelastic configurations for different excitation frequencies in MEMS energy harvesters

Typically two configurations are used for energy harvesting with different advantages: piezoelastic and piezomagnetoelastic. Best performance of the piezoelastic configuration is when the excitation frequency is close to the resonance frequency. If the input frequency slightly deviates from the natural frequency, the generated power is severely decreased. To tackle the problem, the piezomagneto...

Electromechanical characterizations of MEMS based energy harvesters by harmonic sampling analysis method

Abstract This paper presents a new and accurate experimental method based on electrical harmonic distortion analysis to determine mechanical characteristics (resonant frequency) of MEMS devices used in widespread applications as in energy scavenging, cantilever-based microsystems for gas sensing and atomic force microscopy or in any kind of MEMS resonators. Resonant frequencies ranging from 0.8...

Recent Progress on Piezoelectric and Triboelectric Energy Harvesters in Biomedical Systems

Implantable medical devices (IMDs) have become indispensable medical tools for improving the quality of life and prolonging the patient's lifespan. The minimization and extension of lifetime are main challenges for the development of IMDs. Current innovative research on this topic is focused on internal charging using the energy generated by the physiological environment or natural body activit...

A Review of MEMS Based Piezoelectric Energy Harvester for Low Frequency Applications

This paper presents a review of MEMS based piezoelectric energy harvesting for low frequency and low power applications. An introduction to MEMS and its components along with the concept of energy harvesting is presented. The paper also presents a device configuration of cantilever based basic components of MEMS energy harvesters, i.e. unimorph, bimorph. Results of different designs for MEMS en...